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It appears to be refurbished as it shows 0 hours of run time and includes factory test documents
The unit has a minor dent to the upper cover (see photo)
img{max-width:100%} SVG Silicon Valley Group 99-80315-01 Exhaust Flow Controller PCB Rev
Inventory # AA-1268
Part No: 00797-4830-000-00
DIP EH0116(A) Power Supply PCB EH0116 TEL Tokyo Electron Lithius Working Surplus It appears to be refurbishedDIP EH0116(A) Power Supply PCB EH0116 TEL Tokyo Electron Lithius Working Surplus Inventory # A 6397 Part No: EH0116(A) Model No: EH0116 Removed from a TEL Tokyo Electron Clean Track Lithius 300mm System This DIP EH0116(A) Power Supply PCB is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H =